GD-OES analyses is done with sputtering of the surface with argon plasma. The free atoms is then identified by glow discharge emission identification. The spectroscope is available for spectrum which possesses wave length ranging from 110nm to 800nm. Thus GD-OES can analyze even of low mass element as hydrogen and lithium.

On upper picture is shown a schematic drawing of the process. The picture below shows an surface where GD-OES analysis has been performed. Analyse area is either 2 or 4mm.