Smaller power supplies has been demanded for intelligent electronics as thermostats, liquid pumps, wall switches and movement sensors for light control, alarm and surveillance systems, and computer/cell phone battery chargers. Unfortunately power supply technologies are behind due to the problem with limited lifetime of capacitors.
IPU has been involved in a project “TinyPower” funded by Danish Innovationsfonden which aimed to develop a miniaturized integrated power supply converting from 230V to 12V with high frequency switch mode. IPU had a role to develop electroplating processes for MEMS fabrication of micro air-cores as integrated inductor together with DTU Danchip. The process consists of coating on silicon wafer, etching of the wafer, and copper electroplating of the through-silicon-vias with high aspect ratio of 10:1.
TinyPower project group was interviewed by TV2 Lorry in 2018 February. See the video “The smallest power supply in the world: Proud researchers behind breakthroughs”. (in Danish) https://www.tv2lorry.dk/artikel/verdens-mindste-stroemforsyning-stolte-forskere-bag-gennembrud